The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2013
Filed:
Mar. 12, 2010
Helmut Beierl, Heidenheim, DE;
Heiko Feldmann, Aalen, DE;
Jochen Hetzler, Aalen, DE;
Michael Totzeck, Schwaebisch Gmuend, DE;
Helmut Beierl, Heidenheim, DE;
Heiko Feldmann, Aalen, DE;
Jochen Hetzler, Aalen, DE;
Michael Totzeck, Schwaebisch Gmuend, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A projection objective for microlithography includes at least one optical assembly with optical elements which are disposed between an object plane and an image plane. The optical assembly includes at least one optical terminal element, which is disposed close to the image plane. A first immersion liquid is disposed on the image oriented surface of the optical terminal element. A second immersion liquid is disposed on the object oriented surface of the optical terminal element. The object oriented surface includes a first surface section for the imaging light to enter into the terminal element, and the image oriented surface includes a second surface portion for the imaging light to exit from the terminal element.