The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2013
Filed:
Oct. 29, 2009
Takeru Watanabe, Joetsu, JP;
Satoshi Shinachi, Joetsu, JP;
Takeshi Kinsho, Joetsu, JP;
Koji Hasegawa, Joetsu, JP;
Yuji Harada, Joetsu, JP;
Jun Hatakeyama, Joetsu, JP;
Kazunori Maeda, Joetsu, JP;
Tomohiro Kobayashi, Joetsu, JP;
Takeru Watanabe, Joetsu, JP;
Satoshi Shinachi, Joetsu, JP;
Takeshi Kinsho, Joetsu, JP;
Koji Hasegawa, Joetsu, JP;
Yuji Harada, Joetsu, JP;
Jun Hatakeyama, Joetsu, JP;
Kazunori Maeda, Joetsu, JP;
Tomohiro Kobayashi, Joetsu, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Abstract
A fluorinated monomer of cyclic acetal structure has formula (1) wherein R is a C-Calkyl group which may be substituted with halogen or separated by oxygen or carbonyl, and Z is a divalent organic group which forms a ring with alkylenoxy and contains a polymerizable unsaturated group. A polymer derived from the fluorinated monomer may be endowed with appropriate water repellency, water sliding property, lipophilicity, acid lability and hydrolyzability and is useful in formulating a protective coating composition and a resist composition.