The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2013
Filed:
Jul. 12, 2011
Hiroyuki Yamashita, Fujioka, JP;
Mamoru Kobayashi, Hitachinaka, JP;
Eiji Imai, Hitachinaka, JP;
Yoshio Morishige, Honjo, JP;
Koichi Nagoya, Konosu, JP;
Hideki Fukushima, Higashichichibu, JP;
Hiroyuki Yamashita, Fujioka, JP;
Mamoru Kobayashi, Hitachinaka, JP;
Eiji Imai, Hitachinaka, JP;
Yoshio Morishige, Honjo, JP;
Koichi Nagoya, Konosu, JP;
Hideki Fukushima, Higashichichibu, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.