The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2013
Filed:
Dec. 31, 2009
Applicants:
Venkatesh Mohanakrishnaswamy, Chennai, IN;
Loi N. Nguyen, Carrollton, TX (US);
Venkata Ramana Yogi Mallela, Coppell, TX (US);
Inventors:
Venkatesh Mohanakrishnaswamy, Chennai, IN;
Loi N. Nguyen, Carrollton, TX (US);
Venkata Ramana Yogi Mallela, Coppell, TX (US);
Assignee:
STMicroelectronics, Inc., Coppell, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
A packaging scheme for MEMS device is provided. A method of packaging MEMS device in a semiconductor structure includes forming an insulation fence that surrounds the MEMS device on the semiconductor structure. The method further includes attaching a wafer of dielectric material to the insulation fence. The lid wafer, the insulation fence, and the semiconductor structure enclose the MEMS device.