The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2013
Filed:
Dec. 22, 2009
Jun Qian, Sunnyvale, CA (US);
Dominic J. Benvegnu, La Honda, CA (US);
Ningzhuo Cui, Santa Clara, CA (US);
Boguslaw A. Swedek, Cupertino, CA (US);
Thomas H. Osterheld, Mountain View, CA (US);
Jun Qian, Sunnyvale, CA (US);
Dominic J. Benvegnu, La Honda, CA (US);
Ningzhuo Cui, Santa Clara, CA (US);
Boguslaw A. Swedek, Cupertino, CA (US);
Thomas H. Osterheld, Mountain View, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A polishing system includes a polishing pad having a solid light-transmissive window, an optical fiber having an end, and a spacer having a vertical aperture therethrough. A bottom surface of the spacer contacts the end of the optical fiber, a top surface of the spacer contacts the underside of the window, and the vertical aperture is aligned with the optical fiber.