The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2013
Filed:
Dec. 02, 2010
Hiroshi Tsujimoto, Yamanashi, JP;
Makoto Kobayashi, Hsin-chu, TW;
Jun Tamura, Yamanashi, JP;
Nobuhiro Wada, Yamanashi, JP;
Hiroshi Tsujimoto, Yamanashi, JP;
Makoto Kobayashi, Hsin-chu, TW;
Jun Tamura, Yamanashi, JP;
Nobuhiro Wada, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A distance between electrodes can be accurately measured by using a lifter. A substrate processing apparatus includes an upper electrodeand a lower electrodefacing each other within a processing chamber; a lift pinthat is protrusible from and retractable below the lower electrode and lifts up a substrate mounted on the lower electrode to be separated from the lower electrode; a lifterthat elevates the lift pin up and down; and a controllerthat elevates the lift pin upward and brings the lift pin into contact with the upper electrode by driving the lifter while the substrate is not mounted on the lower electrode and measures a distance between the electrodes based on a moving distance of the lifter.