The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2013
Filed:
Sep. 23, 2011
Tsuyoshi Moriya, Nirasaki, JP;
Hiroyuki Nakayama, Nirasaki, JP;
Keisuke Kondoh, Nirasaki, JP;
Hiroki Oka, Nirasaki, JP;
Tsuyoshi Moriya, Nirasaki, JP;
Hiroyuki Nakayama, Nirasaki, JP;
Keisuke Kondoh, Nirasaki, JP;
Hiroki Oka, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A gate valve cleaning method that can clean a gate valve that brings an atmospheric transfer chamber and an internal pressure variable transfer chamber that transfer a substrate into communication with each other or shuts them off from each other without bringing about a decrease in the throughput of a substrate processing system. Before the gate valve brings the atmospheric transfer chamber and the internal pressure variable transfer chamber into communication with each other, the pressure in the internal pressure variable transfer chamber is increased so that the pressure in the internal pressure variable transfer chamber can become higher than the pressure in the atmospheric transfer chamber.