The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2013
Filed:
May. 30, 2012
Shuji Moriya, Yamanashi, JP;
Wataru Okase, Tokyo, JP;
Tsutomu Shinohara, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Michio Yamaji, Osaka, JP;
Yasutaka Hayashi, Osaka, JP;
Toshihide Yoshida, Osaka, JP;
Yasuyuki Omata, Osaka, JP;
Shuji Moriya, Yamanashi, JP;
Wataru Okase, Tokyo, JP;
Tsutomu Shinohara, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Michio Yamaji, Osaka, JP;
Yasutaka Hayashi, Osaka, JP;
Toshihide Yoshida, Osaka, JP;
Yasuyuki Omata, Osaka, JP;
Fujikin Incorporated, Osaka, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.