The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Sep. 17, 2010
Chia-ping Chiang, Taipei, TW;
Yu-po Tang, Taipei, TW;
Ming-hui Chih, Luzhou, TW;
Cheng-kun Tsai, Hsinchu, TW;
Wei-long Wang, Hsin-Chu, TW;
Wen-chun Huang, Xi-Gang Xiang, TW;
Ru-gun Liu, Hsinchu, TW;
Tsai-sheng Gau, Hsin-Chu, TW;
Cheng-lung Tsai, Hsin-Chu, TW;
Josh J. H. Feng, Lotung, TW;
Bing-syun Yeh, Hsinchu, TW;
Jeng-shiun Ho, Hsin-Chu, TW;
Cheng-cheng Kuo, Baoshan Township, Hsinchu County, TW;
Chia-Ping Chiang, Taipei, TW;
Yu-Po Tang, Taipei, TW;
Ming-Hui Chih, Luzhou, TW;
Cheng-Kun Tsai, Hsinchu, TW;
Wei-Long Wang, Hsin-Chu, TW;
Wen-Chun Huang, Xi-Gang Xiang, TW;
Ru-Gun Liu, Hsinchu, TW;
Tsai-Sheng Gau, Hsin-Chu, TW;
Cheng-Lung Tsai, Hsin-Chu, TW;
Josh J. H. Feng, Lotung, TW;
Bing-Syun Yeh, Hsinchu, TW;
Jeng-Shiun Ho, Hsin-Chu, TW;
Cheng-Cheng Kuo, Baoshan Township, Hsinchu County, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
The present disclosure provides one embodiment of an integrated circuit (IC) design method. The method includes receiving an IC design layout having a plurality of main features; applying a main feature dissection to the main features of the IC design layout and generating sub-portions of the main features; performing an optical proximity correction (OPC) to the main features; performing a mask rule check (MRC) to a main feature of the IC design layout; and modifying one of the sub-portions of the main feature if the main feature fails the MRC.