The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Dec. 08, 2010
Takeshi Hagino, Tsukuba, JP;
Yuichiro Yokoyama, Tsukuba, JP;
Yutaka Kuriyama, Tsukuba, JP;
Mitutoyo Corporation, Kawasaki, JP;
Abstract
A Fizeau interferometer includes: a reference spherical surface; and a measuring apparatus including an intensity obtaining section and a form calculating section, wherein: a focal point of the reference spherical surface is aligned with a center of curvature of the spherical surface in order to set the center of curvature as a center position, and two positions equidistant from the center position are set as a start position and an end position, the intensity obtaining section obtains the intensity maps of the interferograms at n positions at equal intervals; and the form calculating section measures the form of the spherical surface using a phase analysis method in which a coefficient of the intensity maps of the interferograms at an i-th position and a coefficient of the intensity maps of the interferograms at an (n−i+1)th position have a same value.