The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Mar. 22, 2010
Faruk Krecinic, Hsin Chu, TW;
Shy-jay Lin, Jhudong Township, Hsinchu County, TW;
Jeng-horng Chen, Hsin-Chu, TW;
Shih-ming Chang, Hsinchu, TW;
Tuane Ying Fang, Hsinchu, TW;
Wei-long Wang, Hsin-Chu, TW;
Chien-hsun Chen, Hsinchu, TW;
Faruk Krecinic, Hsin Chu, TW;
Shy-Jay Lin, Jhudong Township, Hsinchu County, TW;
Jeng-Horng Chen, Hsin-Chu, TW;
Shih-Ming Chang, Hsinchu, TW;
Tuane Ying Fang, Hsinchu, TW;
Wei-Long Wang, Hsin-Chu, TW;
Chien-Hsun Chen, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A direct-write system is provided which includes a stage for holding a substrate, a processing module for processing pattern data and generating instructions associated with the pattern data, and an exposure module that includes beams that are focused onto the substrate and a beam controller that controls the beams in accordance with the instructions. The processing module includes vertex pair processors each having bit inverters. Each vertex pair processor is operable to process a respective vertex pair of an input scan line to generate an output scan line. Each bit inverter is operable to invert a respective input bit of the input scan line to generate a respective output bit of the output scan line if a bit position is located between the respective vertex pair, otherwise the respective input bit is copied to the respective output bit. The instructions correspond to the output bits for each beam.