The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Apr. 22, 2010
Applicants:
Yu-hung Cheng, Hsinchu, TW;
Jhi-cherng LU, Hsinchu, TW;
Ming-hua Yu, Jhubei, TW;
Chii-horng LI, Jhubei, TW;
Tze-liang Lee, Hsinchu, TW;
Inventors:
Yu-Hung Cheng, Hsinchu, TW;
Jhi-Cherng Lu, Hsinchu, TW;
Ming-Hua Yu, Jhubei, TW;
Chii-Horng Li, Jhubei, TW;
Tze-Liang Lee, Hsinchu, TW;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present disclosure discloses an exemplary method for fabricating a semiconductor device comprises selectively growing a material on a top surface of a substrate; selectively growing a protection layer on the material; and removing a portion of the protection layer in an etching gas.