The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
Mar. 04, 2011
Applicants:
Vincent M. Omarjee, Albany, NY (US);
Christian Dussarrat, Wilmington, DE (US);
Jean-marc Girard, Tokyo, JP;
Nicolas Blasco, Grenoble, FR;
Inventors:
Vincent M. Omarjee, Albany, NY (US);
Christian Dussarrat, Wilmington, DE (US);
Jean-Marc Girard, Tokyo, JP;
Nicolas Blasco, Grenoble, FR;
Assignees:
L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude, Paris, FR;
American Air Liquide, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/425 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provides molecules useful for aluminum implant in semiconductor materials. The molecules can be used in various doping techniques such as ion implant, plasma doping or derivates methods.