The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2013
Filed:
Jun. 03, 2009
Ryoji Yoshikawa, Kanagawa, JP;
Tomohide Watanabe, Kanagawa, JP;
Hiromu Inoue, Kanagawa, JP;
Hiroyuki Ikeda, Kanagawa, JP;
Hiroyuki Tanizaki, Kanagawa, JP;
Ryoji Yoshikawa, Kanagawa, JP;
Tomohide Watanabe, Kanagawa, JP;
Hiromu Inoue, Kanagawa, JP;
Hiroyuki Ikeda, Kanagawa, JP;
Hiroyuki Tanizaki, Kanagawa, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A pattern inspection device according to the embodiment, includes: an image picking-up portion for picking-up an image of a pattern formation member in which a plurality of opening patterns are formed so as to obtain a picked-up image of the pattern formation member; a reference image obtaining portion for obtaining a reference image used for comparing with the picked-up image; and a pattern defect detecting portion for matching the center locations of the opening pattern images respectively between the picked-up image and the reference image, forming difference images of the opening pattern images between the picked-up image and the reference image per the opening pattern and detecting the defect of the opening pattern base on the difference images.