The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2013
Filed:
May. 29, 2008
Applicants:
Steven C. Shannon, Raleigh, NC (US);
Kartik Ramaswamy, San Jose, CA (US);
Daniel J. Hoffman, Saratoga, CA (US);
Matthew L. Miller, Fremont, CA (US);
Kenneth S. Collins, San Jose, CA (US);
Inventors:
Steven C. Shannon, Raleigh, NC (US);
Kartik Ramaswamy, San Jose, CA (US);
Daniel J. Hoffman, Saratoga, CA (US);
Matthew L. Miller, Fremont, CA (US);
Kenneth S. Collins, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a plasma reactor employing source and bias RF power generators, plasma is stabilized against an engineered transient in the output of either the source or bias power generator by a compensating modulation in the other generator.