The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2013
Filed:
Nov. 10, 2011
Clement Lansalot-matras, Tsukuba, JP;
Christian Dussarrat, Wilmington, DE (US);
Vincent M. Omarjee, Bear, DE (US);
Cheng-fang Hsiao, Tsukuba, JP;
Clement Lansalot-Matras, Tsukuba, JP;
Christian Dussarrat, Wilmington, DE (US);
Vincent M. Omarjee, Bear, DE (US);
Cheng-Fang Hsiao, Tsukuba, JP;
L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude, Paris, FR;
American Air Liquide, Inc., Fremont, CA (US);
Abstract
Compositions and methods for forming a metal-containing thin film on a substrate. A reactor and at least one substrate in the reactor are provided. A metal-containing bis-β-diketiminate precursor is introduced into the reactor. The reactor is maintained at a set temperature and pressure, and the precursor is contacted with the substrate to form a metal-containing film on the substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile