The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2013
Filed:
Feb. 24, 2009
Wouter Anthon Soer, Nijmegen, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Maarten Marinus Johannes Wilhelmus Van Herpen, Heesch, NL;
Andrei Mikhailovich Yakunin, Eindhoven, NL;
Wouter Anthon Soer, Nijmegen, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Maarten Marinus Johannes Wilhelmus Van Herpen, Heesch, NL;
Andrei Mikhailovich Yakunin, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An optical element includes a first layer that includes a first material, and is configured to be substantially reflective for radiation of a first wavelength and substantially transparent for radiation of a second wavelength. The optical element includes a second layer that includes a second material, and is configured to be substantially absorptive or transparent for the radiation of the second wavelength. The optical element includes a third layer that includes a third material between the first layer and the second layer, and is substantially transparent for the radiation of the second wavelength and configured to reduce reflection of the radiation of the second wavelength from a top surface of the second layer facing the first layer. The first layer is located upstream in the optical path of incoming radiation with respect to the second layer in order to improve spectral purity of the radiation of the first wavelength.