The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2013
Filed:
Nov. 30, 2009
Satya N. Chakravarti, Hopewell Junction, NY (US);
Dechao Guo, Hopewell Junction, NY (US);
Huiming Bu, Albany, NY (US);
Keith Kwong Hon Wong, Hopewell Junction, NY (US);
Satya N. Chakravarti, Hopewell Junction, NY (US);
Dechao Guo, Hopewell Junction, NY (US);
Huiming Bu, Albany, NY (US);
Keith Kwong Hon Wong, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Techniques for incorporating nanotechnology into electronic fuse (e-fuse) designs are provided. In one aspect, an e-fuse structure is provided. The e-fuse structure includes a first electrode; a dielectric layer on the first electrode having a plurality of nanochannels therein; an array of metal silicide nanopillars that fill the nanochannels in the dielectric layer, each nanopillar in the array serving as an e-fuse element; and a second electrode in contact with the array of metal silicide nanopillars opposite the first electrode. Methods for fabricating the e-fuse structure are also provided as are semiconductor devices incorporating the e-fuse structure.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile