The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2012
Filed:
Sep. 30, 2009
Richard Earl Bills, Tucson, AZ (US);
Neil Judell, Newtonville, MA (US);
Klaus Reinhard Freischlad, Tucson, AZ (US);
James Peter Mcniven, Vail, AZ (US);
Richard Earl Bills, Tucson, AZ (US);
Neil Judell, Newtonville, MA (US);
Klaus Reinhard Freischlad, Tucson, AZ (US);
James Peter McNiven, Vail, AZ (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.