The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
Aug. 18, 2010
Mahendra P. Ramachandran, Palo Alto, CA (US);
Steven W. Meeks, Palo Alto, CA (US);
Alireza S. Moghadam, San Jose, CA (US);
Hung P. Nguyen, Santa Clara, CA (US);
Mahendra P. Ramachandran, Palo Alto, CA (US);
Steven W. Meeks, Palo Alto, CA (US);
Alireza S. Moghadam, San Jose, CA (US);
Hung P. Nguyen, Santa Clara, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
An apparatus for inspecting an edge of a substrate. A light source produces a light beam, and a two-dimensional beam deflector receives the light beam and creates a semi-annular scanning beam. A first flared parabolic surface receives the semi-annular scanning beam and directs the semi-annular scanning beam onto the edge of the substrate, thereby creating specularly reflected light from the edge of the substrate. A second flared parabolic surface receives and directs the specularly reflected light to a detector. The detector receives the directed specularly reflected light and produces signals. An analyzer analyzes the signals and detects defects at the edge of the substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile