The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2012
Filed:
Aug. 13, 2009
Hendrikus Gijsbertus Schimmel, Utrecht, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Karel Joop Bosschaart, Eindhoven, NL;
Hendrikus Gijsbertus Schimmel, Utrecht, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Karel Joop Bosschaart, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation source is configured to generate extreme ultraviolet radiation. The radiation source includes a laser constructed and arranged to generate a beam of radiation directed to a plasma generation site where a plasma is generated when the beam of radiation interacts with a fuel, an optical component having a surface that is arranged and positioned to be hit by a droplet of fuel, and a temperature conditioner constructed and arranged to elevate the temperature of the surface.