The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
Jul. 22, 2010
Stephen Biellak, Sunnyvale, CA (US);
Daniel Kavaldjiev, San Jose, CA (US);
George J. Kren, Los Altos Hills, CA (US);
Anatoly Romanovsky, Palo Alto, CA (US);
Christian Wolters, San Jose, CA (US);
Stephen Biellak, Sunnyvale, CA (US);
Daniel Kavaldjiev, San Jose, CA (US);
George J. Kren, Los Altos Hills, CA (US);
Anatoly Romanovsky, Palo Alto, CA (US);
Christian Wolters, San Jose, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
An inspection system may include, but is not limited to: an illumination subsystem for directing light to an inspection specimen comprising: a power attenuator subsystem configured for altering the power level of a light beam emitted by the illumination subsystem; and a power attenuation control subsystem configured to provide control signals to the power attenuator subsystem according to a detected level of light scattering by the inspection specimen upon illumination by the illumination subsystem. A method for scatterometry inspection may include, but is not limited to: directing light having a power level to an inspection specimen from a light source; detecting light scattered from the specimen; and modifying a power level of one or more intermediate light beams within the light source according to a level of light scattering by the specimen upon illumination by the light source.