The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
Oct. 19, 2010
Jae-hyuck Choi, Yongin-si, KR;
Won-jung Kim, Seoul, KR;
Ho-young Kim, Seoul, KR;
Hyung-ho Ko, Hwaseong-si, KR;
Jong-keun OH, Seoul, KR;
Chan-uk Jeon, Seongnam-si, KR;
Keun-hwan Park, Seoul, KR;
Jae-Hyuck Choi, Yongin-si, KR;
Won-Jung Kim, Seoul, KR;
Ho-Young Kim, Seoul, KR;
Hyung-Ho Ko, Hwaseong-si, KR;
Jong-Keun Oh, Seoul, KR;
Chan-Uk Jeon, Seongnam-si, KR;
Keun-Hwan Park, Seoul, KR;
Samsung Electronics Co., Ltd., Gyeonggi-Do, KR;
Abstract
A megasonic cleaning method and a megasonic cleaning apparatus are provided. Microcavitation bubbles may be formed by applying an electromotive force to a cleaning solution using a megasonic energy in a separate room from an object to be cleaned. The microcavitation bubbles having a stable oscillation among the formed microcavitation bubbles may be moved to the object to be cleaned. A surface of the object to be cleaned may be cleaned using the microcavitation bubbles having the stable oscillation. Particles attached onto the surface of the object to be cleaned may be effectively removed while preventing pattern damage.