The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
Jun. 10, 2004
Toshihiro Hayami, Nirasaki, JP;
Takeshi Ohse, Nirasaki, JP;
Jun-ichi Takahira, Niiza, JP;
Jun-ichi Shimada, Niiza, JP;
Toshihiro Hayami, Nirasaki, JP;
Takeshi Ohse, Nirasaki, JP;
Jun-Ichi Takahira, Niiza, JP;
Jun-Ichi Shimada, Niiza, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
In a high-frequency power source, a malfunction is prevented by precisely removing harmonic components or a modulated wave component which develops while producing a plasma, and a proper high frequency power can be impressed on a plasma processing apparatus. The high-frequency power source includes a power monitor constituted of a directional coupler, a mixer, a 100 kHz low-pass filter, a low-frequency detector, and an oscillator. A 100 MHz high-frequency wave including modulated wave components and the like extracted by the directional coupler and 99.9 MHz high-frequency wave oscillated by the oscillator are added by the mixer. An output of the addition is converted by the low-frequency detector into 100 kHz, resulting in detection.