The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2012
Filed:
Jun. 01, 2009
Eva Mondt, Eindhoven, NL;
Noud Jan Gilissen, 's-Gravenzande, NL;
Hernes Jacobs, Rossum, NL;
Nicolaas Ten Kate, Almkerk, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Marcus Martinus Petrus Adrianus Vermeulen, Leende, NL;
Michel Riepen, Veldhoven, NL;
Eva Mondt, Eindhoven, NL;
Noud Jan Gilissen, 's-Gravenzande, NL;
Hernes Jacobs, Rossum, NL;
Nicolaas Ten Kate, Almkerk, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Marcus Martinus Petrus Adrianus Vermeulen, Leende, NL;
Michel Riepen, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A table is disclosed in which measures are taken to seal between the table and an edge of an object, in use, supported on the table. In particular, a capillary passage is formed between the object on the table and the table itself. A meniscus pinning feature and/or the presence of an overpressure at the radially inward side of the capillary passage holds the liquid in the passage and helps prevent it from advancing further radially inwardly. The features to perform this function may be associated with or formed in a member surrounding the object. The member may be thermally decoupled from a part of the table.