The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2012
Filed:
Jan. 14, 2011
Leena Paivikki Buchwalter, Hopewell Junction, NY (US);
Kevin Kok Chan, Staten Island, NY (US);
Timothy Joseph Dalton, Ridgefield, CT (US);
Christopher Vincent Jahnes, Bergen County, NJ (US);
Jennifer Louise Lund, Brookville, MD (US);
Kevin Shawn Petraraca, Newburgh, NY (US);
James Louis Speidell, Poughguag, NY (US);
James Francis Ziegler, Edgewater, MD (US);
Leena Paivikki Buchwalter, Hopewell Junction, NY (US);
Kevin Kok Chan, Staten Island, NY (US);
Timothy Joseph Dalton, Ridgefield, CT (US);
Christopher Vincent Jahnes, Bergen County, NJ (US);
Jennifer Louise Lund, Brookville, MD (US);
Kevin Shawn Petraraca, Newburgh, NY (US);
James Louis Speidell, Poughguag, NY (US);
James Francis Ziegler, Edgewater, MD (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A microelectromechanical system (MEMS) resonator or filter including a first conductive layer, one or more electrodes patterned in the first conductive layer which serve the function of signal input, signal output, or DC biasing, or some combination of these functions, an evacuated cavity, a resonating member comprised of a lower conductive layer and an upper structural layer, a first air gap between the resonating member and one or more of the electrodes, an upper membrane covering the cavity, and a second air gap between the resonating member and the upper membrane.