The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2012
Filed:
May. 28, 2007
Applicants:
Kazuya Dobashi, Nirasaki, JP;
Teruyuki Hayashi, Nirasaki, JP;
Kohei Tsugita, Nirasaki, JP;
Misako Saito, Nirasaki, JP;
Inventors:
Kazuya Dobashi, Nirasaki, JP;
Teruyuki Hayashi, Nirasaki, JP;
Kohei Tsugita, Nirasaki, JP;
Misako Saito, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 1/32 (2006.01); G01N 1/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of analyzing a quartz member includes the step of supplying an etchant to the quartz member so as to etch the quartz member. The method also includes analyzing the etchant used in the supplying step. The etchant is supplied to a concave etchant receiving portion that is formed in the quartz member prior to the supplying step and has an inner wall thereof formed of the quartz member.