The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Jun. 17, 2004
Rainer Obweger, Lind im Drautal, AT;
Alexander Pfeuffer, Villach, AT;
Martin Köffler, Weissenstein, AT;
Alexander Lippert, Gödersdorf, AT;
Rainer Obweger, Lind im Drautal, AT;
Alexander Pfeuffer, Villach, AT;
Martin Köffler, Weissenstein, AT;
Alexander Lippert, Gödersdorf, AT;
Lam Research AG, Villach, AU;
Abstract
A device for wet treatment of wafers includes a first plate and a second plate substantially parallel to the first plate, and a wafer is held between the first and the second plate substantially parallel. A first dispenser introduces fluid into a first gap between the first plate and the wafer when being treated, and a second dispenser introduces fluid into a second gap between the second plate and the wafer when being treated. At least one vibrating element is acoustically coupled to at least the second plate, and a holder and the second plate are rotated relative to each other about an axis substantially perpendicular to the second plate.