The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Dec. 17, 2003
Applicants:
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Markus Franciscus Antonius Eurlings, Tilburg, NL;
Donis George Flagello, Scottsdale, AZ (US);
Inventors:
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Markus Franciscus Antonius Eurlings, Tilburg, NL;
Donis George Flagello, Scottsdale, AZ (US);
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/14 (2011.01);
U.S. Cl.
CPC ...
Abstract
A device manufacturing method, is presented herein. In one embodiment, the device manufacturing method includes a mask for use with DUV having a quartz substrate and chrome absorber. The chrome absorber has a thickness of about 700 nm which causes increased TE polarization in the transmitted light and improves contrast at the substrate level.