The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2012
Filed:
Oct. 18, 2010
Gareth Geoffrey Hougham, Ossining, NY (US);
S. Jay Chey, Ossining, NY (US);
James Patrick Doyle, Bronx, NY (US);
Xiao HU Liu, Croton on Hudson, NY (US);
Christopher V. Jahnes, Upper Saddle River, NJ (US);
Paul Alfred Lauro, Brewster, NY (US);
Nancy C. Labianca, Yalesville, CT (US);
Michael J. Rooks, Briarcliff Manor, NY (US);
Gareth Geoffrey Hougham, Ossining, NY (US);
S. Jay Chey, Ossining, NY (US);
James Patrick Doyle, Bronx, NY (US);
Xiao Hu Liu, Croton on Hudson, NY (US);
Christopher V. Jahnes, Upper Saddle River, NJ (US);
Paul Alfred Lauro, Brewster, NY (US);
Nancy C. LaBianca, Yalesville, CT (US);
Michael J. Rooks, Briarcliff Manor, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method for fabricating a negative thermal expanding system device includes coating a wafer with a thermally decomposable polymer, patterning the decomposable polymer into repeating disk patterns, releasing the decomposable polymer from the wafer and forming a sheet of repeating patterned disks, suspending the sheet into a first solution with seeding compounds for electroless decomposition, removing the sheet from the first solution, suspending the sheet into a second solution to electrolessly deposit a first layer material onto the sheet, removing the sheet from the second solution, suspending the sheet into a third solution to deposit a second layer of material having a lower TCE value than the first layer of material, separating the patterned disks from one another, and annealing thermally the patterned disks to decompose the decomposable polymer and creating a cavity in place of the decomposable polymer.