The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2012
Filed:
Aug. 27, 2007
Jennifer Y. Sun, Sunnyvale, CA (US);
Senh Thach, Union City, CA (US);
Xi Zhu, San Jose, CA (US);
LI Xu, San Jose, CA (US);
Anisul Khan, Santa Clara, CA (US);
Jennifer Y. Sun, Sunnyvale, CA (US);
Senh Thach, Union City, CA (US);
Xi Zhu, San Jose, CA (US);
Li Xu, San Jose, CA (US);
Anisul Khan, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A cleaning process for recovering an anodized aluminum part is particularly useful when the part has been exposed to a fluorine-containing plasma in etch reactor. The part is bathed in an agitated solution of a fluoride acid, such as ammonium fluoride, which converts aluminum fluoride to a soluble fluoride. The part is rinsed in water. The pores of the cleaned anodization may be resealed by a submerging the part in hot agitated deionized water.