The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2012
Filed:
Jun. 18, 2009
Theodore Smick, Essex, MA (US);
Geoffrey Ryding, Manchester, MA (US);
Ronald F. Horner, Auburndale, MA (US);
Paul Eide, Stratham, NH (US);
Marvin Farley, Ipswich, MA (US);
Kan Ota, Bedford, MA (US);
Theodore Smick, Essex, MA (US);
Geoffrey Ryding, Manchester, MA (US);
Ronald F. Horner, Auburndale, MA (US);
Paul Eide, Stratham, NH (US);
Marvin Farley, Ipswich, MA (US);
Kan Ota, Bedford, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
An ion implantation system configured to produce an ion beam is provided, wherein an end station has a robotic architecture having at least four degrees of freedom. An end effector operatively coupled to the robotic architecture selectively grips and translates a workpiece through the ion beam. The robotic architecture has a plurality of motors operatively coupled to the end station, each having a rotational shaft. At least a portion of each rotational shaft generally resides within the end station, and each of the plurality of motors has a linkage assembly respectively associated therewith, wherein each linkage assembly respectively has a crank arm and a strut. The crank arm of each linkage assembly is fixedly coupled to the respective rotational shaft, and the strut of each linkage assembly is pivotally coupled to the respective crank arm at a first joint, and pivotally coupled to the end effector at a second joint.