The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2012
Filed:
Apr. 04, 2008
Akiya Kawaue, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Takehito Seo, Kawasaki, JP;
Hideo Hada, Kawasaki, JP;
Kotaro Endo, Kawasaki, JP;
Daisuke Kawana, Kawasaki, JP;
Yasuhiro Yoshii, Kawasaki, JP;
Tsuyoshi Kurosawa, Kawasaki, JP;
Akiya Kawaue, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Takehito Seo, Kawasaki, JP;
Hideo Hada, Kawasaki, JP;
Kotaro Endo, Kawasaki, JP;
Daisuke Kawana, Kawasaki, JP;
Yasuhiro Yoshii, Kawasaki, JP;
Tsuyoshi Kurosawa, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kanagawa, JP;
Abstract
There are provided a compound preferable as an acid generator for a resist composition, an acid generator including the compound, a resist composition containing the acid generator, and a method of forming a resist pattern using the resist composition, and the compound is represented by general formula (b1-12) shown below:R—CH—O—Y—SOA  (b1-12)