The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2012
Filed:
Oct. 01, 2010
Nicholas Bateman, Reading, MA (US);
Kevin Daniels, Lynnfield, MA (US);
Atul Gupta, Beverly, MA (US);
Russell Low, Rowley, MA (US);
Benjamin Riordon, Newburyport, MA (US);
Robert Mitchell, Winchester, MA (US);
Steven Anella, West Newbury, MA (US);
Nicholas Bateman, Reading, MA (US);
Kevin Daniels, Lynnfield, MA (US);
Atul Gupta, Beverly, MA (US);
Russell Low, Rowley, MA (US);
Benjamin Riordon, Newburyport, MA (US);
Robert Mitchell, Winchester, MA (US);
Steven Anella, West Newbury, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
An improved, lower cost method of processing substrates, such as to create solar cells is disclosed. In addition, a modified substrate carrier is disclosed. The carriers typically used to carry the substrates are modified so as to serve as shadow masks for a patterned implant. In some embodiments, various patterns can be created using the carriers such that different process steps can be performed on the substrate by changing the carrier or the position with the carrier. In addition, since the alignment of the substrate to the carrier is critical, the carrier may contain alignment features to insure that the substrate is positioned properly on the carrier. In some embodiments, gravity is used to hold the substrate on the carrier, and therefore, the ions are directed so that the ion beam travels upward toward the bottom side of the carrier.