The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2012
Filed:
Jan. 16, 2007
David Shafer, Fairfield, CT (US);
Wilhelm Ulrich, Aalen, DE;
Aurelian Dodoc, Heidenheim, DE;
Rudolf Von Buenau, Jena, DE;
Hans-juergen Mann, Oberkochen, DE;
Alexander Epple, Aalen, DE;
Susanne Beder, Aalen, DE;
Wolfgang Singer, Aalen, DE;
David Shafer, Fairfield, CT (US);
Wilhelm Ulrich, Aalen, DE;
Aurelian Dodoc, Heidenheim, DE;
Rudolf Von Buenau, Jena, DE;
Hans-Juergen Mann, Oberkochen, DE;
Alexander Epple, Aalen, DE;
Susanne Beder, Aalen, DE;
Wolfgang Singer, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter D, a maximum image field height Y', and an image side numerical aperture NA; wherein COMP1=D/(Y′·NA) and wherein the condition COMP1<10 holds.