The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2012
Filed:
Apr. 14, 2009
Frank Staals, Eindhoven, NL;
Gerardus Carolus Johannus Hofmans, Eindhoven, NL;
Hans Van Der Laan, Veldhoven, NL;
Sven Gunnar Krister Magnusson, Veldhoven, NL;
Frank Staals, Eindhoven, NL;
Gerardus Carolus Johannus Hofmans, Eindhoven, NL;
Hans Van Der Laan, Veldhoven, NL;
Sven Gunnar Krister Magnusson, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method of measuring a lithographic projection apparatus is described. The method includes imaging a verification mark of a patterning device onto a radiation-sensitive layer held by a substrate table of a lithographic apparatus, wherein the verification mark includes at least a first, a second and a third verification structure that have a mutually different sensitivity profile for a dose setting, a focus setting and a contrast setting.