The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2012
Filed:
Feb. 17, 2010
Applicants:
Tsukasa Watanabe, Nirasaki, JP;
Naoki Shindo, Nirasaki, JP;
Hiroki Ohno, Nirasaki, JP;
Kenji Sekiguchi, Nirasaki, JP;
Inventors:
Tsukasa Watanabe, Nirasaki, JP;
Naoki Shindo, Nirasaki, JP;
Hiroki Ohno, Nirasaki, JP;
Kenji Sekiguchi, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed is a substrate cleaning method for prevent damage to a pattern formed on a substrate. The substrate cleaning method includes cleaning the substrate by striking cleaning particulates carried in a flow of dry air or inert gas against a surface of the substrate, and removing the cleaning particulates.