The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2012
Filed:
Jun. 26, 2009
Hiroki Domon, Tamano, JP;
Yusuke Ogawa, Tamano, JP;
Masaaki Kato, Tamano, JP;
Takamichi Kishi, Tamano, JP;
Naoya Hayamizu, Minato-ku, JP;
Makiko Tange, Minato-ku, JP;
Yoshiaki Kurokawa, Yokohama, JP;
Nobuo Kobayashi, Yokohama, JP;
Hiroki Domon, Tamano, JP;
Yusuke Ogawa, Tamano, JP;
Masaaki Kato, Tamano, JP;
Takamichi Kishi, Tamano, JP;
Naoya Hayamizu, Minato-ku, JP;
Makiko Tange, Minato-ku, JP;
Yoshiaki Kurokawa, Yokohama, JP;
Nobuo Kobayashi, Yokohama, JP;
Chlorine Engineers Corp., Ltd., Chuo-ku, Tokyo, JP;
Toshiba Corp., Ltd., Minato-ku, Tokyo, JP;
Shibaura Mechatronics Corp., Ltd., Yokohama-shi, Kanagawa, JP;
Abstract
The cleaning method by electrolytic sulfuric acid and the manufacturing method of semiconductor device comprising:
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile