The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2012
Filed:
Apr. 23, 2007
Ken Nakao, Nirasaki, JP;
Hitoshi Kato, Nirasaki, JP;
Junichi Hagihara, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
The present invention restrains, during a transfer of a substrate, a central portion of the substrate from being warped by its own weight, which might be caused by a super-enlargement of a diameter of the substrate. A substrate transfer apparatusincludes: a support partwhich is moved above a substrate w of a large diameter; and an upside grip mechanismdisposed on the support part, the upside grip mechanismcapable of supporting a peripheral portion of the substrate w from above. The support partis provided with a non-contact sucking and holding parthaving a suction holeand a blow hole. The non-contact sucking and holding partsucks and holds the substrate w in a non-contact manner, by blowing a gas onto the central portion of the upper surface of the substrate w and sucking the central portion to form an air layersuch that the central portion of the wafer w is not warped.