The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2012
Filed:
Nov. 24, 2009
Marco Wedowski, Aalen, DE;
Nadyeh Shariloo, Legal Representative, Aalen, DE;
Markus Weiss, Aalen, DE;
Stephan Muellender, Aalen, DE;
Johann Trenkler, Schwaebisch Gmuend, DE;
Hartmut Enkisch, Aalen, DE;
Gisela Sipos, Oberkochen, DE;
Hubert Adriaan Van Mierlo, Maassluis, NL;
Michiel David Nijkerk, Amsterdam, NL;
Fokko Pieter Wieringa, Elst, NL;
Marco Wedowski, Aalen, DE;
Nadyeh Shariloo, legal representative, Aalen, DE;
Markus Weiss, Aalen, DE;
Stephan Muellender, Aalen, DE;
Johann Trenkler, Schwaebisch Gmuend, DE;
Hartmut Enkisch, Aalen, DE;
Gisela Sipos, Oberkochen, DE;
Hubert Adriaan van Mierlo, Maassluis, NL;
Michiel David Nijkerk, Amsterdam, NL;
Fokko Pieter Wieringa, Elst, NL;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical element, especially a normal-incidence collector mirror, for radiation in the EUV and/or soft X-ray region of wavelengths is described. The element has a substrate, a multilayer coating with an optically active region, and a capacitor, having a first and a second capacitor electrode. At least one layer of the multilayer coating serves as the first capacitor electrode. At least one dielectric layer is provided between the two capacitor electrodes. Also described is an optical system with at least one optical element, having a first electrode arranged in the vicinity of the optical element.