The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2012
Filed:
Sep. 30, 2009
Applicants:
Volker Drexel, Koenigsbronn, DE;
Ulrich Mantz, Schelklingen, DE;
Bernd Irmer, Munich, DE;
Christian Penzkofer, Munich, DE;
Inventors:
Volker Drexel, Koenigsbronn, DE;
Ulrich Mantz, Schelklingen, DE;
Bernd Irmer, Munich, DE;
Christian Penzkofer, Munich, DE;
Assignees:
Carl Zeiss NTS GmbH, Oberkochen, DE;
nanotools GmbH, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 27/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.