The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2012
Filed:
Jun. 18, 2008
Robert Gerlach, Eagle Mountain, UT (US);
Mostafa Maazouz, Hillsboro, OR (US);
Trevor Dingle, Copper Beech Wood End, GB;
Mark Utlaut, Scappoose, OR (US);
James Mcginn, Portland, OR (US);
Robert Gerlach, Eagle Mountain, UT (US);
Mostafa Maazouz, Hillsboro, OR (US);
Trevor Dingle, Copper Beech Wood End, GB;
Mark Utlaut, Scappoose, OR (US);
James McGinn, Portland, OR (US);
FEI Company, Hillsboro, OR (US);
Abstract
A secondary particle detectorfor a charged particle beam systemincludes a scintillatorand a transducer, such as a photomultiplier tube, positioned within a vacuum chamber. Unlike prior art Everhart-Thornley detectors, the photomultiplier is positioned within the vacuum chamber, which improves detection by eliminating optical couplings and provides flexibility in positioning the detector.