The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2012
Filed:
Feb. 24, 2010
Oliver Aubel, Dresden, DE;
Joerg Hohage, Dresden, DE;
Frank Feustel, Dresden, DE;
Axel Preusse, Radebeul, DE;
Oliver Aubel, Dresden, DE;
Joerg Hohage, Dresden, DE;
Frank Feustel, Dresden, DE;
Axel Preusse, Radebeul, DE;
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
During the formation of complex metallization systems, a conductive cap layer may be formed on a copper-containing metal region in order to enhance the electromigration behavior without negatively affecting the overall conductivity. At the same time, a thermo chemical treatment may be performed to provide superior surface conditions of the sensitive dielectric material and also to suppress carbon depletion, which may conventionally result in a significant variability of material characteristics of sensitive ULK materials.