The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2012
Filed:
Dec. 01, 2008
Applicants:
Sjoerd Nicolaas Lambertus Donders, Vught, NL;
Nicolaas Ten Kate, Almkerk, NL;
Lucas Henricus Johannes Stevens, Eindhoven, NL;
Ronald Van Der Ham, Maarheeze, NL;
Michel Riepen, Veldhoven, NL;
Inventors:
Sjoerd Nicolaas Lambertus Donders, Vught, NL;
Nicolaas Ten Kate, Almkerk, NL;
Lucas Henricus Johannes Stevens, Eindhoven, NL;
Ronald Van Der Ham, Maarheeze, NL;
Michel Riepen, Veldhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03B 27/32 (2006.01);
U.S. Cl.
CPC ...
Abstract
The use of electro wetting to control the behavior of immersion liquid within an immersion lithographic apparatus is disclosed.