The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2012
Filed:
Mar. 26, 2009
Shuo-jieh Wu, Nantou, TW;
Hsu Chun Yuan, Hsinchu, TW;
Tung-li Lee, Jhubei, TW;
Steven LI, Shih-chu, TW;
Hs Chiu, Zhudong Town, TW;
Yen-yu Chen, Taichung, TW;
Alan Chen, Kaohsiung, TW;
Ming Jie He, Jhubei, TW;
Yu-wei Hsueh, Jhubei, TW;
Shuo-Jieh Wu, Nantou, TW;
Hsu Chun Yuan, Hsinchu, TW;
Tung-Li Lee, Jhubei, TW;
Steven Li, Shih-chu, TW;
Hs Chiu, Zhudong Town, TW;
Yen-Yu Chen, Taichung, TW;
Alan Chen, Kaohsiung, TW;
Ming Jie He, Jhubei, TW;
Yu-Wei Hsueh, Jhubei, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
Provided is a method for processing a wafer that includes providing an alloy susceptor including an exterior surface and a wafer contact surface. The exterior surface of the alloy susceptor is treated to produce a roughness of the exterior surface. The roughened exterior surface of is coated with a ceramic material. The alloy susceptor including the ceramic-coated roughened exterior surface is positioned in a wafer process chamber. A plurality of layers of a film are deposited on the ceramic-coated roughened exterior surface of the alloy susceptor, wherein a first adhesion exists between the plurality of layers of the film and the ceramic material coated on the roughened exterior surface of the alloy susceptor that is greater than a second adhesion that would exist between the plurality of layers of the film and a non-roughened exterior surface of the alloy susceptor without the ceramic material.