The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Mar. 09, 2010
Georgiy O. Vaschenko, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
Alexander I. Ershov, Escondido, CA (US);
David Brandt, Escondido, CA (US);
Joshua J. Miller, San Diego, CA (US);
Georgiy O. Vaschenko, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
Alexander I. Ershov, Escondido, CA (US);
David Brandt, Escondido, CA (US);
Joshua J. Miller, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A system and method generating an extreme ultraviolet light in an extreme ultraviolet light chamber including a collector mirror, a droplet generation system having a droplet outlet aligned to output a plurality of droplets along a target material path and a first catch including a first open end substantially aligned to the target material path and at least one internal surface oriented toward a second end of the first catch, the second end being opposite from the first open end.