The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2012
Filed:
Apr. 14, 2011
J. Martin Algots, San Diego, CA (US);
Robert A. Bergstedt, Carlsbad, CA (US);
William N. Partlo, Poway, CA (US);
German E. Rylov, Poway, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
J. Martin Algots, San Diego, CA (US);
Robert A. Bergstedt, Carlsbad, CA (US);
William N. Partlo, Poway, CA (US);
German E. Rylov, Poway, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
An apparatus is disclosed which may comprise a grating receiving light, a first prism moveable to coarsely select an angle of incidence of the light on the grating, and a second prism moveable to finely select an angle of incidence of the light on the grating. In one application, the apparatus may be used as a line narrowing module for a laser light source.