The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2012
Filed:
Jun. 30, 2009
Applicants:
Vincent Mevellec, Boulogne Billancourt, FR;
José Gonzalez, Paris, FR;
Dominique Suhr, Chatenay Malabry, FR;
Inventors:
Vincent Mevellec, Boulogne Billancourt, FR;
José Gonzalez, Paris, FR;
Dominique Suhr, Chatenay Malabry, FR;
Assignee:
Alchimer, Massy, FR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention essentially relates to a method of preparing an electrically insulating film at the surface of an electrical conductor or semiconductor substrate, such as a silicon substrate. According to the invention, this method comprises: