The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2012
Filed:
Jun. 02, 2006
Shuji Moriya, Nirasaki, JP;
Hideki Nagaoka, Nirasaki, JP;
Tsuneyuki Okabe, Oshu, JP;
Hiroshi Itafuji, Kasugai, JP;
Hiroki Doi, Kasugai, JP;
Minoru Ito, Kasugai, JP;
Shuji Moriya, Nirasaki, JP;
Hideki Nagaoka, Nirasaki, JP;
Tsuneyuki Okabe, Oshu, JP;
Hiroshi Itafuji, Kasugai, JP;
Hiroki Doi, Kasugai, JP;
Minoru Ito, Kasugai, JP;
CKD Corporation, Komaki-shi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A gas supply unit and a gas supply system that are small-sized and inexpensive. The gas supply unit is installed on operation gas conveyance pipeline and has fluid control devices communicated via flow path blocks and controlling operation gas. The gas supply unit has the first flow path block, to one side of which an inlet open/close valve included in the fluid control devices is attached, and also has the second flow path block, to one side of which a purge valve included in the fluid control devices is attached. The first flow path block and the second flow path block are layered in the direction perpendicular to the conveyance direction of the operation gas. The inlet open/close valve and the purge valve are arranged between a mass flow controller installed on the operation gas conveyance pipeline and an installation surface where the unit is installed.