The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2012
Filed:
Jun. 29, 2007
Tadashi Suga, Tsukuba, JP;
Shuichi Chikamatsu, Hitachinaka, JP;
Masayuki Ochi, Hitachinaka, JP;
Takahiko Suzuki, Hitachinaka, JP;
Seiji Otani, Hitachinaka, JP;
Tadashi Suga, Tsukuba, JP;
Shuichi Chikamatsu, Hitachinaka, JP;
Masayuki Ochi, Hitachinaka, JP;
Takahiko Suzuki, Hitachinaka, JP;
Seiji Otani, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A defect inspection apparatus enable to efficiently perform a temperature control without involving an enlarged size can be achieved. The parts constituting the defect inspection apparatus are classified into parts need temperature control and parts not to need temperature control; all the parts need temperature control are accommodated together into a temperature-controlled part accommodating section, and the parts not to need temperature control are arranged in a heat radiating unit. The temperature in the temperature-controlled part accommodating sectionis measured by a temperature measuring instrumentand a control CPUin a temperature control unitcarries out control according to the measured temperature so that the interior of the temperature-controlled part accommodating sectionis kept at a fixed temperature. Therefore, it becomes easy to keep the fixed temperature, when compared with a case in which individual parts are temperature-controlled separately by being heated or cooled, yielding an energy saving effect.